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¡Ü ÀçÁú : ¾Ë·ç¹Ì´½ ½Ç¸®ÄÜ ÇÕ±Ý ¡Ü ¸®Å©·® : 10-6mbar§¤/s(¹ëºê), 10-7mbar§¤/s(Ä¿Çøµ) ¡Ü »ç¿ë ¾Ð·Â : 900000~1¡¿10-3Pa ¡Ü º£ÀÌÅ© ¿Âµµ : 60¡É [Specification]
- Material : aluminum silicon alloy - The amount of leaks : 10-6mbarl/s (valve) and 10-7mbarl/s (coupling) - Working pressure range : 15x105Pa (15bar) - Bake temperature : 60 degrees C [FootNote]
* Part number () Inside is the quality of the material of a diaphragm. |